Открытые датчики линейных перемещений

Открытые линейные датчики используются в станках и установках, где необходима высокая точность отображаемых величин.

Область применения открытых линейных датчиков:

  • технологическое и измерительное оборудование в полупроводниковом производстве
  • установки автоматического монтажа в микроэлектронике 
  • ультрапрецизионное оборудование 
  • высокоточные металлообрабатывающие станки
  • компараторы, измерительные машины и микроскопы прецизионная измерительная техника
  • линейные привода

Absolute encoders and encoders with position value output

SeriesDescriptionPosition error per signal periodMeasuring length
LICThe LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 28 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400.± 0,08 µmUp to 28440 mm
LIP 200The LIP 211 and LIP 291 incremental linear encoders output the position information as a position value. The sinusoidal scanning signals are highly interpolated in the scanning head and converted to a position value by the integrated counter function. As with all incremental encoders, the absolute reference is determined with the aid of reference marks.± 0,001 µm20 mm to 3040 mm

Incremental encoders

SeriesDescriptionPosition error per signal periodMeasuring length
LIPThe LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard.Up to ± 0,04 µmUp to 3040 mm
LIFThe LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet).± 0,04 µmUp to 1020 mm 
LIDAThe LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch.Up to ± 0,2 µmUp to 30040 mm 
PPOn the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane.± 0,04 µmMeasuring range 68x68mm